Das Projekt "Entwicklung eines Partikelabscheidungsmeters" wird vom Umweltbundesamt gefördert und von Universität Duisburg, Fachbereich 9 Elektrotechnik, Fachgebiet Prozess- und Aerosolmesstechnik durchgeführt. During the last ten years increasingly stringent requirements have been set for the cleanliness of the production environment for contamination sensitive products. This is not only the case in the microelectronics industry, but also in the field of biotechnology and in the optical industry. Not only the monitoring of airborne particles in the production environment is necessary for the correct manufacture of the products, but particularly the analysis of the deposited particles on the surfaces. Measurement technologies detecting the particle scattered light lead to fast non-contact particle detection and characterisation. A measuring device was developed making it possible to detect in situ particles on a surface. The most important innovation is the use of a transparent material as deposition surface, which makes it possible to illuminate the particles and to detect the scattered light by the particles from the back of the surface. The measured parameter are the number of particles on the surface, the differences between the number of particles per area in specific time intervals (particle flux density) and the particle diameter. The principle verification of the measuring device was carried out with deposited fibres of 4 my m and 12 my m in diameter and with a metalized grid on a glass plate. The measurement results show a definite image of the objects deposited on the surface. To verify if single particles can also be detected from the measuring device Latex particles with diameters from 1,4 my m were deposited on a glass plate. To assure that the detected scattered light signals are in fact from the Latex particles and not from other contaminating objects on the surface the glass plate was additionally analysed with a light microscope incombination with an image processing system. By the comparison of the measurement results with the images of the microscope it was verified that the detected scattered light signals in fact belong to the deposited Latex particles. The measurement data were compared with the calculated scattered light signals for different incident and detecting angles. They showed good agreement.